Archived posting to the Leica Users Group, 1999/01/10
[Author Prev] [Author Next] [Thread Prev] [Thread Next] [Author Index] [Topic Index] [Home] [Search]Alexey Merz alexey@webcom.com wrote: <<...Applied Precision Instruments in Seattle makes steppers with a repeatable absolute accuracy of 10 nm over a greater than 20 mm range of movement. These units are being used in the semiconductor and biotech industries...>> You are comparing micro-actuators which are based on stepper motors and optical step-and-repeat mask aligners which are also commonly referred to as steppers. Applied Precision Instruments makes microscopes for live-cell fluorescence microscopy used for biological diagnostic applications which are not even remotely related to the step-and-repeat masks aligners used in IC fabrication. API also makes linear actuators (with 10 nm positioning resolution) and probe cards analyzers for the semicondutor industry but again, they do not make the kind of steppers that Intel uses to build its Pentiums. <<So I'd have to say that AFM's are by far the most precice pieces of equipment yet made by mankind; they allow the movement and placement of single atoms, and put the best UV photolithography to shame.>> There are simply no basis for comparison between AFMs which are basically high resolution microscopes and steppers which are used to project microscopic images with absolute fidelity. Berg _________________________________________________________ DO YOU YAHOO!? Get your free @yahoo.com address at http://mail.yahoo.com